ISO INTERNATIONAL STANDARD 11039 First edition 2012-02-01 Surface chemical analysis Scanning probe microscopy Measurement of drift rate Analyse chimique des surfaces Microscopie par sonde a balayage - Mesurage du taux de derive Reference number ISO 11039:2012(E) SO @ISO2012 ISO 11039:2012(E) COPYRiGHT PROTECTED DOCUMENT ISO2012 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 · CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Webwww.iso.org Published in Switzerland = @ ISO 2012 - All rights reserved ISO 11039:2012(E) Contents Page Foreword .. iv Introduction 1 Scope 2 Normative references 3 Terms and definitions and abbreviated terms 3.1 Terms and definitions.. 3.2 Abbreviated terms. 4 Measurement method. 2 5 Requirements.. 5.1 Instrument requirements. 5.2 Environment requirements. 6 Measurement procedures 3 6.1 Initialcheck. 6.2 Basic characterization and the settling time 6.3 Further characterization and fresh image areas 6.4 Other specimens . 7 Measurement report Annex A (normative) Image correlation method . Annex B (normative) Characteristic-marker method, 11 Annex C (normative) Non-periodic grating method. Annex D (informative) Guidance to users. Annex E (informative) Instrumental parameters to consider to reduce drift rates Annex F (informative) Example of drift results and analysis. ..18 Bibliography @ ISO 2012 - All rights reserved ii