论文标题
离子和电子能量分布功能的数据处理技术
Data Processing Techniques for Ion and Electron Energy Distribution Functions
论文作者
论文摘要
延迟场能分析仪和兰木探针通常用于获得离子和电子能量分布函数（IEDF，EEDF）。这些通常需要了解I-V特征的第一个和第二个衍生物，这两者都可以通过各种方式获得。这构成了区分嘈杂信号所固有的挑战，这是电探针等离子体诊断的常见问题。对常用的模拟和数值滤波和分化技术的简要回顾，以及它们在射频等离子体中收集的实验数据上的应用。每种方法的应用都详细介绍了所获得的IEDF和EEDF，推导的等离子体参数，动态范围，能量分辨率和信号失真。
Retarding field energy analyzers and Langmuir probes are routinely used to obtain ion and electron energy distribution functions (IEDF, EEDF). These typically require knowledge of the first and second derivatives of the I-V characteristics, both of which can be obtained in various ways. This poses challenges inherent to differentiating noisy signals, a frequent problem with electric-probe plasma diagnostics. A brief review of commonly used analog and numerical filtering and differentiation techniques is presented, together with their application on experimental data collected in a radio-frequency plasma. The application of each method is detailed with regards to the obtained IEDF and EEDF, the deduced plasma parameters, dynamic range, energy resolution and signal distortion.
