论文标题

金属和甘露植入硅的Thz纳米镜检查

THz Nanoscopy of Metal and Gallium Implanted Silicon

论文作者

Wu, Changlin, Wang, Chang, You, Guanjun, Cao, Juncheng

论文摘要

DRUDE模型成功地量化了散装物质的光学常数,但不适用于亚波长度对象。在本文中,Terahertz近场光学显微镜和有限元仿真用于研究镀至凝胶蚀刻的金斑块。在确定光信号强度时发现了电子传输。底物的信号更为复杂,但仍未完全理解。随着蚀刻面积的减小,近场相互作用不受掺杂浓度的控制,并且在连接的金属附近观察到更高的信号。借助模拟,详细讨论了异常增强现象,这为进一步的实验验证奠定了基础。

Drude model successfully quantifies the optical constants for bulk matter, but it is not suitable for subwavelength objects. In this paper, terahertz near-field optical microscopy and finite element simulation are used to study gold patches fabricated by Gallium etching. Electron transport is discovered in determining the optical signal strength. The signal from substrate is more complicated and still not fully understood. As the etching area decreases, near-field interaction is not dominated by doping concentration, and a higher signal is observed near connected metals. With the help of simulation, the abnormal enhancement phenomenon is discussed in detail, which lays the foundation for further experimental verification.

扫码加入交流群

加入微信交流群

微信交流群二维码

扫码加入学术交流群,获取更多资源