论文标题

迈向新一代的单片主动像素传感器

Towards a New Generation of Monolithic Active Pixel Sensors

论文作者

Chauhan, Ankur, Viera, Manuel Del Rio, Eckstein, Doris, Feindt, Finn, Gregor, Ingrid-Maria, Hansen, Karsten, Huth, Lennart, Mendes, Larissa, Mulyanto, Budi, Rastorguev, Daniil, Reckleben, Christian, Daza, Sara Ruiz, Schütze, Paul, Simancas, Adriana, Spannagel, Simon, Stanitzki, Marcel, Velyka, Anastasiia, Vignola, Gianpiero, Wennlöf, Håkan

论文摘要

在65 nm CMOS成像过程中生产的新一代单片活性像素传感器(地图)有望与较大的特征尺寸过程相比,在给定的像素大小上,片上电路的密度更高,并且对于给定的像素尺寸,更复杂的像素内逻辑。由于不需要翻转芯片粘合,地图是杂交像素传感器的成本效益替代品。此外,由于主动传感器的物理厚度较小,并且没有单独的读出芯片,因此它们允许大幅减少检测器系统的材料预算。橘色项目开发了一个适用于未来希格斯工厂的传感器,以及用于在梁测试设施中使用的光束望远镜。传感器将具有小的收集电极($μ$ m),以最大化信噪比,这使得可以最大程度地减少电路中的功率耗散。 2021年底,在Mainzer Mikrotron(Mami)生产和测试了第一批带有前端放大器的测试芯片。测试芯片的模拟输出信号用高带宽示波器记录,并用于研究芯片的电荷敏感放大器,以波形分析。光束望远镜被用作参考系统,以允许对记录数据进行基于轨道的分析。

A new generation of Monolithic Active Pixel Sensors (MAPS), produced in a 65 nm CMOS imaging process, promises higher densities of on-chip circuits and, for a given pixel size, more sophisticated in-pixel logic compared to larger feature size processes. MAPS are a cost-effective alternative to hybrid pixel sensors since flip-chip bonding is not required. In addition, they allow for significant reductions of the material budget of detector systems, due to the smaller physical thicknesses of the active sensor and the absence of a separate readout chip. The TANGERINE project develops a sensor suitable for future Higgs factories as well as for a beam telescope to be used at beam-test facilities. The sensors will have small collection electrodes (order of $μ$m) to maximize the signal-to-noise ratio, which makes it possible to minimize power dissipation in the circuitry. The first batch of test chips, featuring full front-end amplifiers with Krummenacher feedback, was produced and tested at the Mainzer Mikrotron (MAMI) at the end of 2021. MAMI provides an electron beam with currents up to 100 $μ$A and an energy of 855 MeV. The analog output signal of the test chips was recorded with a high bandwidth oscilloscope and used to study the charge-sensitive amplifier of the chips in terms of waveform analysis. A beam telescope was used as a reference system to allow for track-based analysis of the recorded data.

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