论文标题
由PECVD富含硅的无定形碳化物制成的高效热光微环相变
Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide
论文作者
论文摘要
在这项工作中，表征了富含硅的非晶硅（A-SIC）薄膜的热光系数（TOC），这些薄膜由等离子体增强化学蒸气沉积沉积。我们发现，随着其硅含量的增加，膜的TOC增加。测量了TOC的三倍以上，达到了TOC高达$ 1.88 \ times 10^{ - 4} k^{ - 1} $，与晶硅相当。还通过将富含硅的A-SIC微环形结构与NICR加热器相结合，也证明了有效的热光相变。它的调整效率$p_π$低至4.4兆瓦的光波长为1550 nm。这些发现使富含硅的A-SIC成为光子综合电路中热态应用的好材料。
In this work, the thermo-optic coefficient (TOC) of the silicon-rich amorphous silicon carbide (a-SiC) thin film deposited by plasma-enhanced chemical vapor deposition is characterized. We found that the TOC of the film increases as its silicon content increases. A more than three-fold improvement in the TOC is measured, reaching a TOC as high as $1.88 \times 10^{-4} K^{-1}$, which is comparable to that of crystalline silicon. An efficient thermo-optic phase shifter has also been demonstrated by integrating the silicon-rich a-SiC micro-ring structure with a NiCr heater. Its tuning efficiency $P_π$ as low as 4.4 mW has been measured at an optical wavelength of 1550 nm. These findings make silicon-rich a-SiC a good material candidate for thermo-optic applications in photonic integrated circuits.
