论文标题
将高指数CU放在地图上,以进行高收益,干燥转移的CVD石墨烯
Putting high-index Cu on the map for high-yield, dry-transferred CVD graphene
论文作者
论文摘要
2D材料层的可靠,清洁转移和接口在技术上与它们的生长同样重要。由于庞大的相互联系的参数空间,将两者融合在一起仍然是一个挑战。我们引入了快速筛选的描述方法,以在整个Gruseene-CU模型系统的整个过程步骤中演示整体数据驱动的优化。我们将石墨烯化学蒸气沉积,界面Cu氧化的晶体学依赖性绘制为将石墨烯解散及其在反极图的干燥分层。它们的覆盖层使我们能够将迄今未开发的(168)较高的索引Cu取向确定为总体最佳。我们通过外延近距离升华来显示这种Cu取向的有效制备,并以非常高的收率(> 95%)和石墨烯域的质量实现机械转移,室温电子迁移率在40000 cm $^2 $/(VS)的范围内。我们的方法很容易适应其他描述符和2D材料系统,我们讨论了这种整体优化的机会。
Reliable, clean transfer and interfacing of 2D material layers is technologically as important as their growth. Bringing both together remains a challenge due to the vast, interconnected parameter space. We introduce a fast-screening descriptor approach to demonstrate holistic data-driven optimization across the entirety of process steps for the graphene-Cu model system. We map the crystallographic dependencies of graphene chemical vapor deposition, interfacial Cu oxidation to decouple graphene, and its dry delamination across inverse pole figures. Their overlay enables us to identify hitherto unexplored (168) higher index Cu orientations as overall optimal. We show the effective preparation of such Cu orientations via epitaxial close-space sublimation and achieve mechanical transfer with very high yield (>95%) and quality of graphene domains, with room-temperature electron mobilities in the range of 40000 cm$^2$/(Vs). Our approach is readily adaptable to other descriptors and 2D materials systems, and we discuss the opportunities of such holistic optimization.