论文标题

4英寸单晶过渡金属二甲化物在C平面蓝宝石上无效的无效辅助辅助辅助外延生长

Fe-assisted epitaxial growth of 4-inch single-crystal transition-metal dichalcogenides on c-plane sapphire without miscut angle

论文作者

Li, Hui, Yang, Junbo, Li, Xiaohui, Cheng, Mo, Feng, Wang, Du, Ruofan, Wang, Yuzhu, Song, Luying, Wen, Xia, Liao, Lei, Zhang, Yanfeng, Shi, Jianping, He, Jun

论文摘要

晶圆尺度单晶过渡金属二核苷(TMDC)的外延生长和可控制的掺杂是将摩尔定律扩展到硅范围之外的两个核心任务。但是,尽管做出了巨大的努力,但在二维(2D)限制下同时解决了此类关键问题。在这里,我们设计了一种巧妙的外延策略,以合成破纪录的4英寸单晶Fe掺杂的TMDCS单层单层,而没有误视角度。深入的表征和理论计算表明,Fe的引入显着降低了蓝宝石表面上平行步骤的形成能,并有助于单向TMDCS域的边缘 - 核核(> 99%)。由于超高的电子迁移率(〜86 cm2 V -1 S-1)和显着的ON/OFF电流比(〜108)在4英寸单晶FE-MOS2单层上发现,由于超低接触电阻和与金属电极的完美欧欧接触。这项工作代表了弥合晶圆尺度单晶2D半导体的合成和掺杂而无需底物错误的飞跃,这应该促进摩尔定律的进一步降低和扩展。

Epitaxial growth and controllable doping of wafer-scale single-crystal transition-metal dichalcogenides (TMDCs) are two central tasks for extending Moore's law beyond silicon. However, despite considerable efforts, addressing such crucial issues simultaneously under two-dimensional (2D) confinement is yet to be realized. Here we design an ingenious epitaxial strategy to synthesize record-breaking 4-inch single-crystal Fe-doped TMDCs monolayers on industry-compatible c-plane sapphire without miscut angle. In-depth characterizations and theoretical calculations reveal that the introduction of Fe significantly decreases the formation energy of parallel steps on sapphire surfaces and contributes to the edge-nucleation of unidirectional TMDCs domains (>99%). The ultrahigh electron mobility (~86 cm2 V -1 s-1) and remarkable on/off current ratio (~108) are discovered on 4-inch single-crystal Fe-MoS2 monolayers due to the ultralow contact resistance and perfect Ohmic contact with metal electrodes. This work represents a substantial leap in terms of bridging the synthesis and doping of wafer-scale single-crystal 2D semiconductors without the need for substrate miscut, which should promote the further device downscaling and extension of Moore's law.

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