论文标题
负电容效应是否可以用于具有铁电栅极的现场效应晶体管中?
Could the negative capacitance effect be used in field-effect transistors with a ferroelectric gate?
论文作者
论文摘要
我们分析了电势和磁场,极化和电荷的分布,以及硅金属 - 氧化物 - 有效场效应晶体管(MOSFET)的差异电容,其中栅极绝缘子由介质SiO2的薄层组成,由介质SIO2和弱的小铁HFO2组成。如果层厚度接近尺寸诱导的铁电 - - 帕雷氏相变的临界厚度,则似乎可以实现HFO2层C_(HFO_2)<0的准稳态负电容。准稳态的负电容是铁电的非常慢的瞬态状态,对应于整个系统的正电容,因此其外观不会破坏任何热力学原理。栅极绝缘体的准稳态负电容C_IN的实施可以打开主要的可能性,以将MOSFET子阈值摆动降低到临界值以下,并降低栅极电压低于基本玻尔兹曼限制。但是,我们未能找到在准稳态状态下C_IN为负的参数。因此,负C_(HFO_2)不能将子阈值摆动降低到基本限制以下。然而,与C_(HFO_2)<0相关的C_IN的增加可以减少挥杆高于极限,减少操作周期期间的设备加热,从而有助于进一步改善MOSFET性能。
We analyze the distributions of electric potential and field, polarization and charge, and the differential capacitance of a silicon metal-oxide-ferroelectric field effect transistor (MOSFET), in which a gate insulator consists of thin layers of dielectric SiO2 and weak ferroelectric HfO2. It appeared possible to achieve a quasi-steady-state negative capacitance of the HfO2 layer, C_(HfO_2 )<0, if the layer thickness is close to the critical thickness of the size-induced ferroelectric-paraelectric phase transition. The quasi-steady-state negative capacitance, being a very slow-varying transient state of the ferroelectric, corresponds to a positive capacitance of the whole system, and so its appearance does not break any thermodynamic principle. Implementation of the quasi-steady-state negative capacitance C_ins of the gate insulator can open the principal possibility to reduce the MOSFET subthreshold swing below the critical value, and to decrease the gate voltage below the fundamental Boltzmann limit. However, we failed to found the parameters for which C_ins is negative in the quasi-steady states; and thus, the negative C_(HfO_2 ) cannot reduce the subthreshold swing below the fundamental limit. Nevertheless, the increase in C_ins, related with C_(HfO_2 )<0, can decrease the swing above the limit, reduce device heating during the operation cycles, and thus contribute to further improvements of the MOSFET performances.