论文标题
通过转移印刷，将硝酸锂微环谐振器的光子整合到氮化硅波导芯片上
Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing
论文作者
论文摘要
首次证明了通过转移打印方法将硝酸锂光子波导器件在氮化硅波导平台上的异质整合到硝酸硅波导平台上。开发了制造工艺，以使独立的尼橙色锂膜设备与后端积分兼容光子整合电路。通过使用激光直接写入和等离子干蚀刻来定义膜格式的微环谐振器。然后将硝酸锂微环谐振器从其宿主底物转移，并释放到氮化硅波导芯片上。在1.5μm至1.6μm波长范围内获得了全通环谐振器透射光谱，其中测得的Q因子大于32000。
The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 μm to 1.6 μm wavelength range, with a measured loaded Q-factor larger than 32000.
