论文标题
基于创建和转移印刷的集成在半导体芯片上的独立木膜微镜头
Fabrication and transfer print based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
论文作者
论文摘要
我们证明了通过微型组装到非本地半导体底物上的宽带，高NA GAN微镜头的后端整合。我们开发了一个高度平行的微型制作过程流量，以悬挂从6英寸Si增长晶片中的微米尺度的Plano-Convex镜头血小板，并显示其随后的转移打印机的整合。一种生长过程与生产未塑料的蚀刻量与蚀刻量进行优化，以与蚀刻量产生2.11 $ flating。 $ $ m的高度和根平方的表面粗糙度在2 nm以下。可见到红外光耦合应用的潜力。
We demonstrate the back-end integration of broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel micro-fabrication process flow to suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers was combined with optimisation of the etching volume in order to produce flat devices for printing. Lens structures were fabricated with 6 to 11 $μ$m diameter, 2 $μ$m height and root-mean-squared surface roughness below 2 nm. The lenses were printed in a vertically coupled geometry on a single crystalline diamond substrate and with $μ$m-precise placement on a horizontally coupled photonic integrated circuit waveguide facet. Optical performance analysis shows that these lenses could be used to couple to diamond nitrogen vacancy centres at micron scale depths and demonstrates their potential for visible to infrared light-coupling applications.
