论文标题
氮化铝波导束拆分器，用于集成的量子光子电路
Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits
论文作者
论文摘要
我们在绝缘子上使用溅射的多晶铝（ALN）展示了用于量子设备的集成光子电路。芯片ALN波导方向耦合器是量子光子学中最重要的组件之一，是制造的，并显示了从50:50到99：1的输出功率分割比。从ALN方向耦合器中也实现了超过10 dB的灭绝比的极化束分裂体。使用制造的Aln波导束拆分器，我们观察到Hong-Ou-Mandel干扰，可见性为91.7 +（ - ）5.66％。
We demonstrate integrated photonic circuits for quantum devices using sputtered polycrystalline aluminum nitride (AlN) on insulator. The on-chip AlN waveguide directional couplers, which are one of the most important components in quantum photonics, are fabricated and show the output power splitting ratios from 50:50 to 99:1. The polarization beam splitters with an extinction ratio of more than 10 dB are also realized from the AlN directional couplers. Using the fabricated AlN waveguide beam splitters, we observe the Hong-Ou-Mandel interference with a visibility of 91.7 +(-) 5.66 %.
