论文标题
反应性,颗粒生长等离子体中的原位粒径诊断的辐射转移模拟
Radiative transfer simulations for in-situ particle size diagnostic in reactive, particle growing plasmas
论文作者
论文摘要
当考虑反应性等离子体中产生的颗粒时,通常需要知道它们的基本特性,例如折射率和晶粒尺寸。可以通过显微镜和原位来限制它们,例如,偏振法,即分析散射光的极化状态。偏振法具有时间分辨率和实时测量的优点,但是分析通常受单个散射的假设和光学上的灰尘云的限制。这将生长过程的研究通常限制在小于200 nm的谷物大小上。但是,使用3D极化辐射转移模拟,可以考虑多个散射并分析致密粒子云的性质。 我们研究尘埃云对散射极化的各种特性的影响,即云的光学深度,颗粒的空间密度分布,其折射率以及粒度分散体。我们发现,有关光学深度和空间密度分布以及折射率和粒度分散体的歧义性可能会发生。正确确定折射率尤其重要,因为它对派生的粒径产生了强大的影响。有了这些知识,我们能够基于辐射转移模拟来设计一种原位诊断策略,以研究粒子生长过程,该模拟用于对整个生长过程中的极化进行建模。这种策略的应用使我们首次分析在反应性氩气血浆中的生长实验中测量的极化,用于颗粒半径高达280 nm。
When considering particles produced in reactive plasmas, their basic properties, such as refractive index and grain size often need to be known. They can be constrained both ex-situ, e.g., by microscopy, and in-situ by polarimetry, i.e., analyzing the polarization state of scattered light. Polarimetry has the advantage of temporal resolution and real-time measurement, but the analysis is often limited by the assumption of single scattering and thus optically thin dust clouds. This limits the investigation of the growth process typically to grain sizes smaller than about 200 nm. Using 3D polarized radiative transfer simulations, however, it is possible to consider multiple scattering and to analyze the properties of dense particle clouds. We study the impact of various properties of dust clouds on the scattering polarization, namely the optical depth of the cloud, the spatial density distribution of the particles, their refractive index as well as the particle size dispersion. We find that ambiguities can occur regarding optical depth and spatial density distribution as well as regarding refractive index and particle size dispersion. Determining the refractive index correctly is especially important as it has a strong impact on the derived particle sizes. With this knowledge, we are able to design an in-situ diagnostics strategy for the investigation of the particle growth process based on radiative transfer simulations which are used to model the polarization over the whole growth process. The application of this strategy allows us for the first time to analyze the polarization measured during a growth experiment in a reactive argon-acetylene plasma for particle radii up to 280 nm.