论文标题
谐振传感器的分辨率限制非线性
Resolution Limits of Resonant Sensors with Duffing Non-Linearity
论文作者
论文摘要
谐振传感器的分辨率从根本上受到噪声的存在限制。当消除所有其他噪声源时,热机械噪声(与谐振器的固有性)设置了最终的传感器性能。对于线性谐振器,始终可以通过增加驾驶能力来进一步提高传感分辨率。但是,这种趋势不能无限期地持续下去,因为在足够高的驱动力下,非线性效应出现并影响噪声性能。结果,谐振器的非线性特性在确定其最终分辨率限制中起着不可忽视的作用。最近,几项工作研究了非线性谐振器作为传感器的特征性能,并以直观的结论是,增加谐振器的质量因子并不能在热力学极限下改善其传感分辨率。在这项工作中,我们进一步分析了最终的分辨率限制,并在谐振器的衰减时间下方和更高时分描述了整合时间的不同性能制度。我们提供了一个分析模型,以阐明非线性对闭环传感器分辨率的影响,并使用数值模拟对其进行验证。与以前的作品相反,我们的模型和模拟表明,在某些条件下,可以通过最大化其质量因子来改善行李谐振器的最终感应分辨率。通过在纳米力学膜谐振器上进行测量,我们通过实验验证了该模型,并证明可以实现超过先前已知限制的频率分辨率。
The resolution of resonant sensors is fundamentally limited by the presence of noise. Thermomechanical noise, intrinsic to the resonator, sets the ultimate sensor performance when all other noise sources have been eliminated. For linear resonators, the sensing resolution can always be further improved by increasing the driving power. However, this trend cannot continue indefinitely, since at sufficiently high driving powers non-linear effects emerge and influence the noise performance. As a consequence, the resonator's non-linear characteristics play an inextricable role in determining its ultimate resolution limits. Recently, several works have studied the characteristic performance of non-linear resonators as sensors, with the counter intuitive conclusion that increasing the quality factor of a resonator does not improve its sensing resolution at the thermomechanical limit. In this work we further analyze the ultimate resolution limits, and describe different regimes of performance at integration times below and above the resonator's decay time. We provide an analytical model to elucidate the effects of Duffing non-linearity on the resolution of closed-loop sensors, and validate it using numerical simulations. In contrast to previous works, our model and simulations show that under certain conditions the ultimate sensing resolution of a Duffing resonator can be improved by maximizing its quality factor. With measurements on a nanomechanical membrane resonator, we experimentally verify the model and demonstrate that frequency resolutions can be achieved that surpass the previously known limits.