论文标题
单层整合，宽带，高效硅氮气中的硅波导光电探测器中可见光的集成光子平台
Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform
论文作者
论文摘要
可见的和近红外光谱光子综合电路正在迅速成为解决量子信息和生物传感方面挑战的关键技术。到目前为止，该光谱范围内的集成光子平台缺乏集成的光电探测器。在这里，我们报告了第一个单一集成在硅上的可见光光子平台中的二硅波导光电探测器。 Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of > 60% across a record wavelength span from $λ$ ~400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 $\pm$ 30 GHz.例如，将光电探测器与单个芯片中的波长 - 可接合微孔集成在一起，以进行芯片电源监测。
Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report the first silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of > 60% across a record wavelength span from $λ$ ~400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 $\pm$ 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.
