论文标题
单像素MEMS光谱仪使用可调光栅
Single Pixel MEMS Spectrometer using Electrothermal Tunable Grating
论文作者
论文摘要
微型光谱仪被广泛用于非破坏性和现场光谱分析。在这里，我们报告了可见的基于光栅的MEMS光谱仪，可见到近红外（Vis-NIR）光谱。 MEMS光谱仪由球形镜和一个可调式光栅组成。光谱仪通过倾斜衍射光栅来检测具有单像素检测器的分散光谱信号。从电热驱动和高度分散衍射光栅的较大倾斜角分别改善了光谱范围和分辨率。 MEMS光谱仪在1.7 cm3之内完全包装，并提供可测量的光谱范围，最高为800 nm，平均光谱分辨率为1.96 nm。这种微型单金光谱仪可以为农业，工业或医疗领域的高级移动光谱分析提供多种应用。
Miniaturized spectrometers are widely used for non-destructive and on-field spectral analysis. Here we report a tunable grating-based MEMS spectrometer for visible to near-infrared (VIS-NIR) spectroscopy. The MEMS spectrometer consists of a spherical mirror and an electrothermally actuated tunable grating. The spectrometer detects the dispersed spectral signal with a single-pixel detector by tilting the diffraction grating. The large tilting angle from electrothermal actuation and highly dispersive diffraction grating improves the spectral range and resolution, respectively. The MEMS spectrometer was fully packaged within 1.7 cm3 and provides a measurable spectral range up to 800 nm with an average 1.96 nm spectral resolution. This miniaturized single-pixel spectrometer can provide diverse applications for advanced mobile spectral analysis in agricultural, industrial, or medical fields.
