论文标题
迈向晶圆尺度生产二维过渡金属果酱
Towards Wafer-Scale Production of TwoDimensional Transition Metal Chalcogenides
论文作者
论文摘要
二维（2D）过渡金属硫化剂（TMC）由于其多样性以及通过层数，组成和界面工程的卓越可调性而引起了科学和技术社区的极大兴趣。 2D TMC的晶圆尺度生产对于这些材料的工业应用至关重要。通过各种方法，已将广泛的努力赋予了2D TMC的大区域增长。在这篇综述中，首先突出显示了通过化学蒸气沉积（CVD），金属有机CVD，物理蒸气沉积等不同方法获得大区域2D TMC的最新进展。然后讨论了控制晶粒，形态，层数和相位的策略，以实现2D TMC的可控且均匀的厚度和大晶体结构域。还引入了大区域2D TMC在电子，光电子，旋转三位型等中的应用。最后，提供了晶圆尺度2D TMC的未来发展的想法和前景。
Two-dimensional (2D) Transition Metal Chalcogenides (TMCs) have attracted tremendous interest from both the scientific and technological communities due to their variety of properties and superior tunability through layer number, composition, and interface engineering. Wafer-scale production of 2D TMCs is critical to the industrial applications of these materials. Extensive efforts have been bestowed to the large-area growth of 2D TMCs through various approaches. In this review, recent advances in obtaining large-area 2D TMCs by different methods such as chemical vapor deposition (CVD), metal-organic CVD, physical vapor deposition are firstly highlighted and their advantages and disadvantages are also evaluated. Then strategies for the control of the grains, morphology, layer number and phase to achieve controllable and uniform thicknesses and large crystal domains for 2D TMCs are discussed. Applications of large-area 2D TMCs in electronics, optoelectronics, spintronics etc. are also introduced. Finally, ideas and prospects for the future developments of wafer-scale 2D TMCs are provided.
