论文标题
较弱的测量值估计表面粗糙度估计的精度改进了十倍
Ten more times precision improved method for surface roughness estimation with weak measurement
论文作者
论文摘要
高精度表面粗糙度估计在许多应用中起着重要作用。但是，经典估计方法受射击噪声的限制，只能通过白光干涉仪实现0.1 nm的精度。在这里，我们提出了两种弱测量方案，以通过频谱分析和强度分析来估计表面粗糙度。通过使用当前可用的光谱仪，分辨率为$δλ= 0.04 $ pm，使用频谱分析的估计精度约为$ 10 ^{ - 5} $ nm，相应的灵敏度大于0.1 THz/nm。光强度分析方案的精度和灵敏度分别达到高达0.07 nm和1/nm。通过引入调制阶段，我们表明我们的方案中达到的灵敏度和精度可以有效地保留在更广泛的动态范围内。我们进一步根据我们的方案提供了表面剖面的实验设计。它同时满足了高精度，高灵敏度和广泛测量范围的要求，使其成为有前途的实用工具。
High-precision surface roughness estimation plays an important role in many applications. However, the classical estimating methods are limited by shot noise and only can achieve the precision of 0.1 nm with white light interferometer. Here, we propose two weak measurement schemes to estimate surface roughness through spectrum analysis and intensity analysis. The estimating precision with spectrum analysis is about $10 ^{-5}$ nm by using a currently available spectrometer with the resolution of $Δλ= 0.04$ pm and the corresponding sensitivity is better than 0.1 THz/nm. And the precision and sensitivity of the light intensity analysis scheme achieve as high as 0.07 nm and 1/nm, respectively. By introducing a modulated phase, we show that the sensitivity and precision achieved in our schemes can be effectively retained in a wider dynamic range. We further provide the experimental design of the surface profiler based on our schemes. It simultaneously meets the requirements of high precision, high sensitivity, and wide measurement range, making it to be a promising practical tool.
