论文标题

溅射功率对NIO膜的电致色观特性的影响

Sputtering power effects on the electrochromic properties of NiO films

论文作者

Acuña, Juan R. Abenuz, Perez, Israel, Sosa, Victor, Gamboa, Fidel, Elizalde, Jose T., Farias, Rurik, Carrillo, Diana, Enriquez, Jose L., Burrola, Andres, Mani, Pierre

论文摘要

研究了溅射功率($ p $ = 60 w-180 w)对通过RF Magnetron溅射技术沉积在ITO涂层玻璃基板上的镍氧化物膜的电致感性能的影响。分别通过X射线衍射(XRD)和扫描电子显微镜(SEM)评估晶体结构和形态。用循环伏安法和计时度测定法评估了溅射功率对样品电色的影响。我们在碳酸盐溶液中使用LICLO $ _4 $进行LI插入/提取。通过X射线光电子光谱(XPS)分析了LI插入之前和之后样品的化学组成。我们观察到NIO的立方相具有溅射功率,主要影响结晶度和晶粒尺寸。这些反过来影响了电致色谱。着色效率从24.4 cm $^{2} $/c降至(15.4,13.7。16.1)cm $^{2} $/c/c/c/c/c/c/c/c,而可逆性从40%到30%,因为溅射功率从60 w增加到60 w的增加到180 w。在较大的范围中,在较大的情况下,在较大的胶片上,对于较大的效果而言,在60 W上较大的发射量,然后将其用于60 W,然后在60 W上出现,然后将其延伸到60 W上。 XPS分析表明,$ p $的较高值促进了膜表面上镍氧化物的形成。由于结晶度和形态的变化,镍氧化物的存在增加,表明样品的电致色素特性不仅受溅射能力的影响,而且还受其化学成分的影响。

The effect of sputtering power ($P$=60 W-180 W) on the electrochromic properties of nickel oxide films deposited on ITO-coated glass substrates by the RF magnetron sputtering technique was investigated. Crystalline structure and morphology were assessed by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The effect of sputtering power on electrochromism of the samples was evaluated with cyclic voltammetry and chronoamperometry. We used LiClO$_4$ in propilene carbonate solution for Li insertion/extraction. The chemical composition of the samples before and after Li intercalation was analyzed by X-ray photoelectron spectroscopy (XPS). We observed the cubic phase of NiO with sputtering power mainly affecting crystallinity and grain size. These in turn affect the electrochromic properties. Coloration efficiency reduces from 24.4 cm$^{2}$/C to (15.4, 13.7. 16.1) cm$^{2}$/C and the reversibility from 40% to 30% as sputtering power increases from 60 W to 180 W. The impedance spectra indicates that ion diffusion is larger for the film grown at 60 W and then goes down for the films deposited at higher sputtering powers. XPS analysis reveals that higher values of $P$ promote the formation of nickel hydroxides on the film surface. As consequence of changes in crystallinity and morphology, the presence of nickel hydroxides increases, showing that not only the electrochromic properties of the samples are affected by the sputtering power but also their chemical composition.

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