论文标题
闭环MOEM加速度计
Closed-Loop MOEMS Accelerometer
论文作者
论文摘要
在本文中，提出了基于Fabry-Pérot（FP）干涉仪的闭环微型机电系统（MOEMS）加速度计。 FP腔是在切割的单模光纤的末端和证明质量（PM）的横截面之间形成的，该量被四个U形弹簧悬浮。应用的加速度倾向于向相反的方向移动PM。固定和可移动的梳子手指的阵列产生静电力，使PM保持其静止位置。可以提供该静电力的电压被视为传感器的输出。使用闭环检测方法，可以增加测量范围而不会丢失分辨率。所提出的传感器使用散装微加工方法在硅在绝缘子晶圆上制造。传感器表征的结果表明，加速度计的线性响应在5 g范围内。在闭环模式下，传感器的灵敏度和偏置不稳定性分别为1.16 v/g和40 g。
In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the cross-section of a proof mass (PM) which is suspended by four U-shaped springs. The applied acceleration tends to move the PM in the opposite direction. The arrays of fixed and movable comb fingers produce an electrostatic force which keeps the PM in its resting position. The voltage that can provide this electrostatic force is considered as the output of the sensor. Using a closed-loop detection method it is possible to increase the measurement range without losing the resolution. The proposed sensor is fabricated on a silicon-on-insulator wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of 5 g. In the closed-loop mode, the sensitivity and bias instability of the sensor are 1.16 V/g and 40 g, respectively.
