论文标题

氧化铝在915 MHz的微波烧结:建模,过程控制和微观结构分布

Microwave Sintering of Alumina at 915 MHz: Modeling, Process Control, and Microstructure Distribution

论文作者

Marinel, Sylvain, Manière, Charles, Bilot, Anthony, Bilot, Christelle, Harnois, Christelle, Riquet, Guillaume, Valdivieso, François, Meunier, Christophe, Coureau, Christophe, Barthélemy, François

论文摘要

微波能可以有利地用于材料处理,因为它提供了高加热速率和均匀温度场分布。这些特征部分是由于微波渗透深度大的介电材料,在室温下,大多数介电材料中的几厘米。但是,到目前为止,这项技术尚未广泛用于高温材料处理应用程序(> 1200 {\ textDegree} c),因为它可重复地且能够烧结大型样品(> 30 cm 3)的能力。在这种情况下,本文介绍了由SIC感官和难治性热绝缘制成的经验设计的915 MHz单模型腔,以及该过程的3 d建模,以提高我们对其的理解。在数值测试中测试了不同的受体几何形状和耦合缝位置,以便更好地了解这些参数如何影响场均匀性和过程稳定性。发现将平行于电场平行的击穿器的最大表面定位,可以使材料非常均匀且混合加热,同时避免血浆或热不稳定性。这与3 d建模结果相关。最后,由于一个完全自动化的系统,该设备被用来烧结大尺寸(〜30 cm 3)低损坏介电氧化铝样品。随后以密度,谷物尺寸分布和均匀性来表征烧结的材料。还讨论了证明过程效率和可靠性的可重复性。

Microwave energy can be advantageously used for materials processing as it provides high heating rates and homogeneous temperature field distribution. These features are partly due to the large microwave penetration depth into dielectric materials which is, at room temperature, a few centimeters in most dielectric materials. However, up to now, this technology is not widely spread for high-temperature materials processing applications (>1200{\textdegree}C), because its reproducibly and ability to sinter large size samples (>30 cm 3) still needs to be improved. In this context, this paper describes both an empirically designed 915 MHz single-mode cavity made from SiC susceptors and refractory thermal insulation, and the 3 D modeling of the process in order to improve our understanding of it. Different susceptors geometries and coupling slit position were numerically tested in order to better understand how these parameters impact the field homogeneity and the process stability. It was found that positioning the largest surface of the susceptors parallel to the electrical field allows a very uniform and hybrid heating of the material, while avoiding plasma or thermal instabilities. This was correlated to the 3 D modeling results. Finally, thanks to a fully automatized system this apparatus was used to sinter large size (~30 cm 3) low-loss dielectric alumina samples. The sintered materials were subsequently characterized in terms of density, grains size distribution and homogeneity. The reproducibility was also discussed demonstrating the process efficiency and reliability.

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