论文标题
磁场弹性高动电感超导氮化物Coclanar波导谐振器
Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators
论文作者
论文摘要
我们表征了硝酸盐（NBN）$λ/2 $ Coplanar波导谐振器，这些谐振器是由溅射沉积生长的二氧化硅上的10nm厚膜制成的。对于在120°C下生长的膜，我们报告了与正常平方电阻为1K $ω$相关的超导临界温度，导致动力学电感为192ph/$ \ box $。我们在零磁场的单个光子状态下，我们制造了具有高达4.1k $ω$和内部质量因子的特征阻抗和内部质量因子$ q_ \ mathrm {i}> 10^4 $的谐振器。此外，在许多光子状态下，谐振器在6T平面磁场以及300mt的平面外磁场中，具有$ q_ \ mathrm {i}> 10^4 $的高磁场弹性。这些发现使此类谐振器成为CQED实验的引人注目的选择，该实验涉及在有限磁场中运行的小型电偶极矩。
We characterize niobium nitride (NbN) $λ/2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120°C we report a superconducting critical temperature of 7.4K associated with a normal square resistance of 1k$Ω$ leading to a kinetic inductance of 192pH/$\Box$. We fabricated resonators with a characteristic impedance up to 4.1k$Ω$ and internal quality factors $Q_\mathrm{i} > 10^4$ in the single photon regime at zero magnetic field. Moreover, in the many photons regime, the resonators present high magnetic field resilience with $Q_\mathrm{i} > 10^4$ in a 6T in-plane magnetic field as well as in a 300mT out-of-plane magnetic field. These findings make such resonators a compelling choice for cQED experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.
