论文标题
通过高压CF4等离子体对六角硼的选择性蚀刻,以单独的一维欧姆接触与石墨烯层
Selective Etching of Hexagonal Boron Nitride by High-Pressure CF4 Plasma for Individual One-dimensional Ohmic Contacts to Graphene Layers
论文作者
论文摘要
我们描述了一种使用CF4和O2等离子体封装在六角硼(H-BN)中的单个石墨烯层的一维欧姆接触技术。 H-BN对石墨烯的高蚀刻选择性是通过增加血浆压力来实现H-BN的高蚀刻性(> 1000),而石墨烯则是蚀刻剂,以保护底层H-BN。低压的O2血浆各向异性在垂直方向上蚀刻石墨烯,该石墨烯在H-BN侧壁处暴露了石墨烯边缘。尽管有O2等离子体轰击,但下H-BN层的作用是绝缘层。因此,这种方法使我们能够在第二个石墨烯层上的H-BN上对金属电极进行模板。随后的电子梁光刻和蒸发在活跃于低温温度的石墨烯边缘上构成金属接触。通过制备石墨烯大厅杆,带有石墨后门和双重双层 - 格雷烯厅杆设备来证明这种制造方法。该方法启用了设备几何形状的高灵活性,可以在静电耦合石墨烯层上访问各种实验。
We describe a technique for making one-dimensional ohmic contacts to individual graphene layers encapsulated in hexagonal boron nitride (h-BN) using CF4 and O2 plasmas. The high etch selectivity of h-BN against graphene (>1000) is achieved by increasing the plasma pressure, which enables etching of h-BN, while graphene acts as an etch stop to protect underlying h-BN. A low-pressure O2 plasma anisotropically etches graphene in the vertical direction, which exposes graphene edges at h-BN sidewalls. Despite the O2 plasma bombardment, the lower h-BN layer functions as an insulating layer. Thus, this method allows us to pattern metal electrodes on h-BN over a second graphene layer. Subsequent electron-beam lithography and evaporation fabricate metal contacts at the graphene edges that are active down to cryogenic temperatures. This fabrication method is demonstrated by the preparation of a graphene Hall bar with a graphite back-gate and double bilayer-graphene Hall bar devices. The high flexibility of the device geometries enabled by this method creates access to a variety of experiments on electrostatically coupled graphene layers.