论文标题
离子诱导的二级电子发射对电离真空仪稳定性的影响
Influence of ion induced secondary electron emission on the stability of ionisation vacuum gauges
论文作者
论文摘要
研究了暴露于热阴极电离真空仪的典型环境的不同材料的表面修饰。这种环境是在特殊设计的设置中生成的,该设置模拟了拜亚德 - alpert电离真空表中的条件。在暴露于AR和H2气体排放样品之前和之后,已经进行了X射线光电子光谱和工作功能研究的特征。大多数研究的材料,例如钼,黄金或不锈钢,被认为是离子收集器的感兴趣。此外,使用铜和石墨的实验揭示了暴露于电离真空表环境中发生的主要过程。由于在操作过程中,离子收集器的二级电子发射特性的变化可能会影响电离真空仪的稳定性,因此测量了低能AR+离子轰击引起的相应电子产率。结果表明,暴露于电离真空量规环境有助于烃层的发展,而与收集物材料或气体排放中的主要物种无关。因此,离子诱导的清洁材料的二级电子产量将在仪表运行期间发生变化,并最终达到饱和度,无论收集物材料如何。结果还表明,碳氢化合物层不能通过标准真空烘焙程序来解吸,而离子轰炸甚至会增加碳氢化合物层形成的速率。
Surface modification of different materials exposed to an environment typical for hot cathode ionisation vacuum gauges was investigated. Such environment has been generated in a specially designed setup which simulates conditions in a Bayard-Alpert ionisation vacuum gauge. Characterisations by means of X-ray photoelectron spectroscopy and work function study have been performed before and after the sample exposure to Ar and H2 gas discharges. The majority of studied materials, such as molybdenum, gold or stainless steel, are considered to be of interest as ion collectors. In addition, experiments with copper and graphite revealed the major processes that are taking place during the exposure to an ionisation vacuum gauge environment. Since the stability of ionisation vacuum gauges can be affected by the change of secondary electron emission properties of ion collectors during the operation, the corresponding electron yield induced by bombardment of low energy Ar+ ions was measured. Results show that exposure to ionisation vacuum gauge environment contributes to development of hydrocarbon layers, independently from the collector material or the dominant species in the gas discharge. Therefore, ion induced secondary electron yield of clean materials will be changing during the gauge operation and eventually reach saturation regardless of the collector material. The results also show that the hydrocarbon layer cannot be desorbed by standard vacuum baking procedures, whilst ion bombardment will even increase the rate of the hydrocarbon layer formation.