论文标题

一种通用方法,用于将图案化材料存放在原处

A universal method for depositing patterned materials in-situ

论文作者

Chen, Yifan, Hung, Siu Fai, Lo, Wing Ki, Chen, Yang, Shen, Yang, Kafenda, Kim, Su, Jia, Xia, Kangwei, Yang, Sen

论文摘要

当前的图案化材料沉积技术需要单独的步骤来进行图案和材料沉积。复杂性和严峻的工作条件对制造有严重的限制。在这里,我们介绍了一种新型的单步且易于适应的方法,可以将材料存放在原位中。其独特的方法基于半导体纳米颗粒辅助光子诱导的化学还原和光学诱捕。这种通用机制可用于沉积大量材料,包括金属,绝缘子和磁铁,质量与当前技术相当。用几种材料与光学限制分辨率的精确度相结合,可以从宏观到显微镜尺度实现。此外,该设置自然与基于光学显微镜的测量值兼容,因此可以在原位实现样品表征和材料沉积。用这种方法在2D或3D中制造的各种设备表明,它已准备好在实际应用中部署。这种革命性的方法将为材料技术提供独特的工具。

Current techniques of patterned material deposition require separate steps for patterning and material deposition. The complexity and harsh working conditions post serious limitations for fabrication. Here, we introduce a novel single-step and easy-to-adapt method that can deposit materials in-situ. Its unique methodology is based on the semiconductor nanoparticle assisted photon-induced chemical reduction and optical trapping. This universal mechanism can be used for depositing a large selection of materials including metals, insulators and magnets, with quality on par with current technologies. Patterning with several materials together with optical-diffraction-limited resolution accuracy can be achieved from macroscopic to microscopic scale. Furthermore, the setup is naturally compatible with optical microscopy based measurements, thus sample characterisation and material deposition can be realised in-situ. Various devices fabricated with this method in 2D or 3D show it is ready for deployment in practical applications. This revolutionary method will provide a distinct tool in material technology.

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