论文标题

朝着2D辣椒剂的双分子束外延外观,用更强的层间范德华耦合解释

Towards twin-free molecular beam epitaxy of 2D chalcogenides explained by stronger interlayer van der Waals coupling

论文作者

Mortelmans, Wouter, De Smet, Karel, Meng, Ruishen, Houssa, Michel, De Gendt, Stefan, Heyns, Marc, Merckling, Clement

论文摘要

2D材料的无缺陷外延生长是在半导体行业成功整合范德华(VDW)材料的圣杯之一。因此,仔细研究了分层2D硫化盐的大区域(准)VDW外延,因为这些材料具有非常有前途的纳米电源应用。缺陷的形成,例如60o双胞胎等堆叠断层和60o晶界,仍然关注2D硫代基化剂的无缺陷外延生长的主要关注点。尽管目前正在考虑克服这些缺陷的增长策略,但在增长的初始阶段,对这些缺陷的起源有了更基本的了解。因此,这项工作的重点是对2D硫代基化剂的(Quasi)vdw外观的60o双形成的理解,这些(Quasi-)依赖于由密度功能理论(DFT)计算支持的系统分子束外延(MBE)实验依赖于系统的分子束外延(MBE)实验。 MBE实验揭示了Quasi-VDW杂音和VDW HomoePitaxy中WSE2和BI2SE3之间60o双胞胎形成的显着差异,从我们的DFT计算,它们链接到Interlayer VDW偶联强度的差异。与WSE2相比,BI2SE3中较强的层间VDW耦合导致对双形成的增强控制,因此对无缺陷外延整合的前景明显更大。 (Quasi-)VDW外观的这个有趣的方面表明,层间偶联的强度是功能2D材料的关键,并为其他共享强层相互作用的VDW材料打开了观点。

Defect-free epitaxial growth of 2D materials is one of the holy grails for a successful integration of van der Waals (vdW) materials in the semiconductor industry. The large-area (quasi-)vdW epitaxy of layered 2D chalcogenides is consequently carefully being researched since these materials hold very promising properties for future nanoelectronic applications. The formation of defects such as stacking faults like 60o twins and consequently 60o grain boundaries is still of major concern for the defect-free epitaxial growth of 2D chalcogenides. Although growth strategies to overcome the occurrence of these defects are currently being considered, more fundamental understanding on the origin of these defects at the initial stages of the growth is highly essential. Therefore this work focuses on the understanding of 60o twin formation in (quasi-)vdW epitaxy of 2D chalcogenides relying on systematic molecular beam epitaxy (MBE) experiments supported by density functional theory (DFT) calculations. The MBE experiments reveal the striking difference in 60o twin formation between WSe2 and Bi2Se3 in both quasi-vdW heteroepitaxy and vdW homoepitaxy, which from our DFT calculations links to the difference in interlayer vdW coupling strength. The stronger interlayer vdW coupling in Bi2Se3 compared to WSe2 results in a striking enhanced control on twin formation and hence shows significantly more promise for defect-free epitaxial integration. This interesting aspect of (quasi-)vdW epitaxy reveals that the strength of interlayer vdW coupling is key for functional 2D materials and opens perspectives for other vdW materials sharing strong interlayer interactions.

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