论文标题
详细的电子能量损失光谱（EELS）半角度收集的数据的微分析小于等离子体截止角度和入射束收敛半角度的微分析
Detailed Electron Energy Loss Spectroscopy (EELS) Microanalysis of Data Collected Under Semi-Angle Less Than Both Plasmon Cutoff Angle and Incident Beam Convergence Semi-Angle
论文作者
论文摘要
In previous work a different and powerful, analytical, technique was used to get data, such as the absolute atom concentration (AAC), specimen thickness etc., from public domain boron nitride EELS spectrum collected under a collection semi-angle, $β$, less than the plasmon cutoff angle, $θ_{c}$, but large relative to incident beam convergence, $α$.在这里，寻求某种完整性，另一种数值，技术可用，也可以用$β<θ_{c} $进行分钟细节描述，并应用于使用$β/α<2 $获得的数据，因此需要与事件相关相关的相关校正。许多实验性物理参数彼此完全相关均来自单个鳗鱼谱。公共域硝酸盐硅，si $ _ {3} $ n $ _ {4} $，使用的鳗鱼光谱。由两个$β<θ_{C} $ - 与之相关的技术可产生的结果之间的比较。结果范围从AAC，密度，等离子临界载体，等离子体分散系数，费米能等参数到标本厚度。使用EELSMICR程序的5版获得了结果，并将其与使用非EELS技术获得的现有结果进行了比较。
In previous work a different and powerful, analytical, technique was used to get data, such as the absolute atom concentration (AAC), specimen thickness etc., from public domain boron nitride EELS spectrum collected under a collection semi-angle, $β$, less than the plasmon cutoff angle, $θ_{c}$, but large relative to incident beam convergence, $α$. Here, seeking for some completeness, another, numerical, technique usable together with, also, $β< θ_{c}$ is described in minute detail and applied to data obtained with $β/α< 2$, so necessitating incident beam convergence-related corrections. A lot of experimental physical parameters all fully relevant to one another are produced from a single EELS spectrum. Of public domain silicon nitride, Si$_{3}$N$_{4}$, EELS spectrum used. Comparison between results producible by the two $β<θ_{c}$-related techniques made. Results range from parameters such as AAC, density, plasmon critical vector, plasmon dispersion coefficient, Fermi energy to specimen thickness. Results were obtained using version 5 of eelsMicr program and compared with existing results obtained using non EELS techniques.
