论文标题
七个几何相似的真空室的量比比较不同的材料和热处理
Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments
论文作者
论文摘要
我们已经测量了七个相同几何形状的七个真空室的水和氢气速率，但由不同的材料和热处理构建。测试了五种不同材料的腔室：304L，316L和316LN不锈钢；钛（ASTM 2级）；和6061铝。此外，对316升和316升不锈钢构建的腔室进行了真空飞行过程，在真空下，它们被加热至约950°C 24小时；这两个腔室被指定为316L-XHV和316LN-XHV。所有腔室都是相同的几何形状，并由同一制造商制造，因此可以对这些腔室之间的汇率进行相对比较。使用吞吐量技术来测量水量的量。 316L，316LN，316L-XHV，316LN-XHV的水量均超过了供水结果，但在10^4 s时低于304L的水结果。 Ti和Al腔室的水结果量接近304L，Ti略低。使用上升速度方法测量氢气率，并在低温烘烤为125°C至150°C后进行至少72小时。 Ti，Al，316L-XHV和316LN-XHV腔室的特定额外汇率低于1 x 10^-11 pa l s^-1 cm^-2，并且至少比304L腔室高100倍或更好。没有真空热处理的304L，316L和316LN腔室的氢气速率比其他腔室具有更大的氢气速率，其特定的超出速率在4.0 x 10^-11 pa l s^-1 cm^-2和8.0 x 10^-10 x 10^-11 pa l s l s^-1 cm^-1 cm^-2之间。我们得出的结论是，TI，AL，316L-XHV和316LN-XHV具有氢气率，这使它们成为超高真空（UHV）和极高真空（XHV）应用的绝佳选择，根据成本和其他材料特性，选择的选择是选择。
We have measured the water and hydrogen outgassing rates of seven vacuum chambers of identical geometry but constructed of different materials and heat treatments. Chambers of five different materials were tested: 304L, 316L, and 316LN stainless steels; titanium (ASTM grade 2); and 6061 aluminum. In addition, chambers constructed of 316L and 316LN stainless steel were subjected to a vacuum-fire process, where they were heated to approximately 950 °C for 24 hours while under vacuum; these two chambers are designated as 316L-XHV and 316LN-XHV. All chambers were of identical geometry and made by the same manufacturer, thus a relative comparison of the outgassing rates among these chambers can be made. Water outgassing rates were measured as a function of time using the throughput technique. The water outgassing results for the 316L, 316LN, 316L-XHV, 316LN-XHV were all similar, but lower than those of 304L by a factor of 3 to 5 lower at 10^4 s. The water outgassing results for Ti and Al chambers were close to that of 304L, Ti being slightly lower. Hydrogen outgassing rates were measured using the rate-of-rise method and performed after a low-temperature bake of 125 °C to 150 °C for a minimum of 72 hours. The Ti, Al, 316L-XHV, and 316LN-XHV chambers all have specific outgassing rates below 1 X 10^-11 Pa L s^-1 cm^-2 and are at least a factor of 100 or better than the 304L chamber. The 304L, 316L, and 316LN chambers without vacuum-fire heat treatment have larger hydrogen outgassing rates than the other chambers, with specific outgassing rates ranging between 4.0 X 10^-11 Pa L s^-1 cm^-2 and 8.0 X 10^-11 Pa L s^-1 cm^-2. We conclude that Ti, Al, 316L-XHV, and 316LN-XHV have hydrogen outgassing rates that make them excellent choices for ultra-high vacuum (UHV) and extreme-high vacuum (XHV) applications, the choice depending on cost and other material properties.
