论文标题
4.22亿Q平面整合了全波导谐振器,并具有34亿吸收有限的Q和Sub-MHz线宽
422 Million Q Planar Integrated All-Waveguide Resonator with a 3.4 Billion Absorption Limited Q and Sub-MHz Linewidth
论文作者
论文摘要
高Q光学谐振器是超鼻涕线宽激光器,频率稳定,精度光谱和量子应用的关键组件。将这些谐振器集成到光子波导晶片尺度平台中是降低其成本,大小和功率以及对环境干扰的敏感性的关键。但是,迄今为止,全波导谐振器的固有Q已降低到1.5亿以下。在这里,我们报告了一个全波导SI3N4谐振器,其内在Q为4.22亿,吸收损失有限为Q。谐振器具有453 kHz的固有线路固定线,906 kHz的线宽和加载的线宽,均具有3005的效果,均为3005。上覆氧化物。这些是最高的内在和吸收损失有限的Q因子,迄今为止报告的全波导谐振器迄今为止报告的最低线宽。通过仔细减少散射和吸收损失成分来实现这种水平。我们量化,模拟和衡量各种损失贡献,包括散射和吸收,包括我们认为部分负责吸收的呈悬念键。除了超高的Q和狭窄的线宽外,谐振器还具有较大的光学模式区域和体积,这对于超低激光线宽至关重要,以及超稳定的超低频率噪声参考腔。这些结果表明,可以在光子集成溶液中实现大量光学和蚀刻谐振器的性能,从而为光子集成兼容兼容数十亿Q腔铺平了精确的科学系统以及非线性光学,原子时钟,量子光子光子学和高强度纤维纤维通信系统(高实用性传播系统)。
High Q optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration of these resonators in a photonic waveguide wafer-scale platform is key to reducing their cost, size and power as well as sensitivity to environmental disturbances. However, to date, the intrinsic Q of integrated all-waveguide resonators has been relegated to below 150 Million. Here, we report an all-waveguide Si3N4 resonator with an intrinsic Q of 422 Million and a 3.4 Billion absorption loss limited Q. The resonator has a 453 kHz intrinsic linewidth and 906 kHz loaded linewidth, with a finesse of 3005. The corresponding linear loss of 0.060 dB/m is the lowest reported to date for an all-waveguide design with deposited upper cladding oxide. These are the highest intrinsic and absorption loss limited Q factors and lowest linewidth reported to date for a photonic integrated all-waveguide resonator. This level of performance is achieved through a careful reduction of scattering and absorption loss components. We quantify, simulate and measure the various loss contributions including scattering and absorption including surface-state dangling bonds that we believe are responsible in part for absorption. In addition to the ultra-high Q and narrow linewidth, the resonator has a large optical mode area and volume, both critical for ultra-low laser linewidths and ultra-stable, ultra-low frequency noise reference cavities. These results demonstrate the performance of bulk optic and etched resonators can be realized in a photonic integrated solution, paving the way towards photonic integration compatible Billion Q cavities for precision scientific systems and applications such as nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications systems on-chip.