论文标题

4.22亿Q平面整合了全波导谐振器,并具有34亿吸收有限的Q和Sub-MHz线宽

422 Million Q Planar Integrated All-Waveguide Resonator with a 3.4 Billion Absorption Limited Q and Sub-MHz Linewidth

论文作者

Puckett, Matthew W., Liu, Kaikai, Chauhan, Nitesh, Zhao, Qiancheng, Jin, Naijun, Cheng, Haotian, Wu, Jianfeng, Behunin, Ryan O., Rakich, Peter T., Nelson, Karl D., Blumenthal, Daniel J.

论文摘要

高Q光学谐振器是超鼻涕线宽激光器,频率稳定,精度光谱和量子应用的关键组件。将这些谐振器集成到光子波导晶片尺度平台中是降低其成本,大小和功率以及对环境干扰的敏感性的关键。但是,迄今为止,全波导谐振器的固有Q已降低到1.5亿以下。在这里,我们报告了一个全波导SI3N4谐振器,其内在Q为4.22亿,吸收损失有限为Q。谐振器具有453 kHz的固有线路固定线,906 kHz的线宽和加载的线宽,均具有3005的效果,均为3005。上覆氧化物。这些是最高的内在和吸收损失有限的Q因子,迄今为止报告的全波导谐振器迄今为止报告的最低线宽。通过仔细减少散射和吸收损失成分来实现这种水平。我们量化,模拟和衡量各种损失贡献,包括散射和吸收,包括我们认为部分负责吸收的呈悬念键。除了超高的Q和狭窄的线宽外,谐振器还具有较大的光学模式区域和体积,这对于超低激光线宽至关重要,以及超稳定的超低频率噪声参考腔。这些结果表明,可以在光子集成溶液中实现大量光学和蚀刻谐振器的性能,从而为光子集成兼容兼容数十亿Q腔铺平了精确的科学系统以及非线性光学,原子时钟,量子光子光子学和高强度纤维纤维通信系统(高实用性传播系统)。

High Q optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration of these resonators in a photonic waveguide wafer-scale platform is key to reducing their cost, size and power as well as sensitivity to environmental disturbances. However, to date, the intrinsic Q of integrated all-waveguide resonators has been relegated to below 150 Million. Here, we report an all-waveguide Si3N4 resonator with an intrinsic Q of 422 Million and a 3.4 Billion absorption loss limited Q. The resonator has a 453 kHz intrinsic linewidth and 906 kHz loaded linewidth, with a finesse of 3005. The corresponding linear loss of 0.060 dB/m is the lowest reported to date for an all-waveguide design with deposited upper cladding oxide. These are the highest intrinsic and absorption loss limited Q factors and lowest linewidth reported to date for a photonic integrated all-waveguide resonator. This level of performance is achieved through a careful reduction of scattering and absorption loss components. We quantify, simulate and measure the various loss contributions including scattering and absorption including surface-state dangling bonds that we believe are responsible in part for absorption. In addition to the ultra-high Q and narrow linewidth, the resonator has a large optical mode area and volume, both critical for ultra-low laser linewidths and ultra-stable, ultra-low frequency noise reference cavities. These results demonstrate the performance of bulk optic and etched resonators can be realized in a photonic integrated solution, paving the way towards photonic integration compatible Billion Q cavities for precision scientific systems and applications such as nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications systems on-chip.

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