论文标题
零电源化学传感器
Zero Power Chemical Sensors
论文作者
论文摘要
我们提出了批处理，低功率和高敏感的传感器。我们介绍了用于生物感密度的批处理侧壁蚀刻垂直纳米式隧道缝线的设计，制造和表征。该设备由两个垂直堆叠的金电极组成，该电极由A-SI和SIO2的部分蚀刻的牺牲间隔层隔开。使用这些设备，我们通过测量跨纳米胶质形成的靶介导的分子连接的隧道特性来证明某些有机分子的电检测。
We present batch-fabricated, low-power and highly sensitive sensors. We present the design, fabrication, and characterization of batch-fabricated sidewall etched vertical nanogap tunneling-junctions for bio-sensing. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer-layer of a-Si and SiO2. Using these devices, we demonstrate the electrical detection of certain organic molecules from measurements of tunneling characteristics of target-mediated molecular junctions formed across nanogaps.
