论文标题

应变的扫描电子衍射断层扫描

Scanning electron diffraction tomography of strain

论文作者

Tovey, Robert, Johnstone, Duncan N., Collins, Sean M., Lionheart, William R. B., Midgley, Paul A., Benning, Martin, Schönlieb, Carola-Bibiane

论文摘要

应变工程用于在一系列现代技术中获得理想的材料特性。然而,这些材料中三维应变张量场的直接纳米级测量受到缺乏合适的实验技术和数据分析工具的限制。扫描电子衍射已成为一种强大的工具,用于获得垂直于入射电子束方向的应变成分的二维图。通过使用此类数据没有正式的张量张量构造框架来限制这种方法以恢复整个三维应变张量场的扩展。在这里,我们表明,可以重建完整的非对称应变张量场作为解决不良张量层析成像反问题的解决方案。然后,我们在分析和计算上证明了此层析成像问题的特性,强调了为什么将进动纳入进行扫描进动电子衍射可能很重要。我们为非对称张量层析成像建立了一个通用框架,并通过扫描进动电子衍射数据在计算上证明了其适用于菌株断层扫描的适用性。

Strain engineering is used to obtain desirable materials properties in a range of modern technologies. Direct nanoscale measurement of the three-dimensional strain tensor field within these materials has however been limited by a lack of suitable experimental techniques and data analysis tools. Scanning electron diffraction has emerged as a powerful tool for obtaining two-dimensional maps of strain components perpendicular to the incident electron beam direction. Extension of this method to recover the full three-dimensional strain tensor field has been restricted though by the absence of a formal framework for tensor tomography using such data. Here, we show that it is possible to reconstruct the full non-symmetric strain tensor field as the solution to an ill-posed tensor tomography inverse problem. We then demonstrate the properties of this tomography problem both analytically and computationally, highlighting why incorporating precession to perform scanning precession electron diffraction may be important. We establish a general framework for non-symmetric tensor tomography and demonstrate computationally its applicability for achieving strain tomography with scanning precession electron diffraction data.

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