论文标题

超出分辨率使用ENZ纳米腔的两个光子直接激光写作

Hyper Resolution Two Photon Direct Laser Writing using ENZ Nano-Cavity

论文作者

Lio, Giuseppe Emanuele, Ritacco, Tiziana, Ferraro, Antonio, De Luca, Antonio, Caputo, Roberto, Giocondo, Michele

论文摘要

据报道,一种新型技术可改善两光子直接激光写作光刻的分辨率。得益于非凡的$ \ varepsilon_ {nz} $(接近零)的高度直接启用,超薄的介电超溶性纳米结构已触及。关于标准直接激光写作方法,在5nm至50nm之间可调节的结构高度时,可以将尺寸降低$ 89 \%$ $和50 \%$,高度和宽度。检索到的2D制造参数被利用用于制造超果3D结构。特别是,已经实现了Da Vinci的\ textit {“带有Ermine的女士”}的高度详细的介电浮雕(全高500 nm)。概念验证结果显示了在反爆炸应用,扁平光学和光子学中当前和潮流研究方案的有趣提示。

A novel technique is reported to improve the resolution of two-photon direct laser writing lithography. Thanks to the high collimation enabled by extraordinary $\varepsilon_{NZ}$ (near-zero) metamaterial features, ultra-thin dielectric hyper resolute nanostructures are within reach. With respect to the standard direct laser writing approach, a size reduction of $89\%$ and $50\%$ , in height and width respectively, is achieved with the height of the structures adjustable between 5nm and 50nm. The retrieved 2D fabrication parameters are exploited for fabricating hyper resolute 3D structures. In particular, a highly detailed dielectric bas-relief (500 nm of full height) of Da Vinci's \textit{"Lady with an Ermine"} has been realized. The proof-of-concept result shows intriguing cues for the current and trendsetting research scenario in anti-counterfeiting applications, flat optics and photonics.

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