论文标题
软化学协助基于纳米结构石英的压电微电机械系统的片上整合
Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System
论文作者
论文摘要
用于传感和精确频率控制应用的高级压电石英MEMS的开发需要纳米结构和该材料硅上的芯片整合。但是，当前的石英制造方法基于硅上的键合体微机械晶体，该晶体限制了石英微设备的大小，性能，集成成本和可扩展性。在这里，我们结合了化学溶液沉积，软纳米印刷光刻和自上而下的微加工过程，以开发第一个纳米结构的外延100 quartz 100 si piezoelectric悬臂。连贯的Si Quartz界面和薄膜薄度结合了硅绝缘硅技术的受控纳米结构底物，提供了高力和质量敏感性，同时保留了微机械系统的机械质量因子。这项工作证明，基于硅的生物相容性纳米结构的外延压电石英的内存可以通过结合软化学和自上而下的光刻技术来以低成本进行设计。
The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost and the scalability of quartz micro devices. Here, we combine chemical solution deposition, soft nanoimprint lithography and top down microfabrication processes to develop the first nanostructured epitaxial 100 quartz 100 Si piezoelectric cantilevers. The coherent Si quartz interface and film thinness combined with a controlled nanostructuration on silicon insulator silicon technology substrates provides high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric quartz based MEMS on silicon can be engineered at low cost by combining soft chemistry and top down lithographic techniques.
