论文标题
在10μm下运行的超快速量子孔炎症光电探测器,在室温下响应不足70GHz
Ultra-fast quantum-well infared photodetectors operating at 10μm with flat response up to 70GHz at room temperature
论文作者
论文摘要
III-V半导体中红外光电遗传学基于跨带的过渡,具有多达数百个GHz的超高速操作的巨大潜力。在这项工作中,我们利用〜350nm厚的GAAS/AL0.2GA0.8AS多量器 - 孔孔异质结构以10UM波长的形式证明异差检测,其在室温下几乎平坦的频率响应高达70GHz,在室温下,非常受测量系统的限制。这是迄今为止量子孔中红外光电探测器据报道的最广泛的RF带宽。分别在300K和77K处获得0.15A/W和1.5A/W的竞争。为了允许在正常入射率下进行超快操作和照明,该检测器由50OHM共扎波导组成,并与悬挂式电线电气互连的2D阵列单层整合。在此设备体系结构的情况下,我们获得了〜30ff的寄生电容,对应于天线的静电电容,在300K下产生RC限制的3DB截止频率> 150GHz,并用小信号等效电路模型提取。使用此模型,我们定量地重现检测器频率响应,并在室温下找到低至1PS的固有滚动时间常数。
III-V semiconductor mid-infrared photodetectors based on intersubband transitions hold a great potential for ultra-high-speed operation up to several hundreds of GHz. In this work we exploit a ~350nm-thick GaAs/Al0.2Ga0.8As multi-quantum-well heterostructure to demonstrate heterodyne detection at 10um wavelength with a nearly flat frequency response up to 70GHz at room temperature, solely limited by the measurement system bandwidth. This is the broadest RF-bandwidth reported to date for a quantum-well mid-infrared photodetector. Responsivities of 0.15A/W and 1.5A/W are obtained at 300K and 77K respectively. To allow ultrafast operation and illumination at normal incidence, the detector consists of a 50Ohm coplanar waveguide, monolithically integrated with a 2D-array of sub-wavelength antennas, electrically interconnected by suspended wires. With this device architecture we obtain a parasitic capacitance of ~30fF, corresponding to the static capacitance of the antennas, yielding a RC-limited 3dB cutoff frequency >150GHz at 300K, extracted with a small-signal equivalent circuit model. Using this model, we quantitively reproduce the detector frequency response and find intrinsic roll-off time constants as low as 1ps at room temperature.