论文标题
高质量的三维铝微波腔
High Quality 3-Dimensional Aluminum Microwave Cavities
论文作者
论文摘要
我们介绍了一项全面研究，该研究是由铝制成的超导几何形状3维腔的全面研究。我们使用湿蚀刻，退火和电化学抛光来改善AS机加工质量因子。我们发现，主要的损失渠道在两级系统损失和60:40比例的未知来源之间分配。总共研究了17个不同纯度，共振频率和大小的腔。我们的治疗导致可再现的腔体，其中十个显示内部质量因素以上8000万，其功率与腔中平均单个光子的平均值相对应。最好的腔体的内部质量系数在单光子水平上为1.15亿。
We present a comprehensive study of internal quality factors in superconducting stub-geometry 3-dimensional cavities made of aluminum. We use wet etching, annealing and electrochemichal polishing to improve the as machined quality factor. We find that the dominant loss channel is split between two-level system loss and an unknown source with 60:40 proportion. A total of 17 cavities of different purity, resonance frequency and size were studied. Our treatment results in reproducible cavities, with ten of them showing internal quality factors above 80 million at a power corresponding to an average of a single photon in the cavity. The best cavity has an internal quality factor of 115 million at single photon level.
