论文标题
动态薄膜干涉法的高光谱成像
Hyperspectral imaging for dynamic thin film interferometry
论文作者
论文摘要
动态薄膜干涉法是一种用于非侵入性表征薄液膜厚度的技术。从捕获的干涉图中恢复基础厚度，无条件和自动自动仍然是一个开放的问题。在这里，我们报告了一种紧凑的设置，该设置采用快照高光谱摄像头和相关算法，以自动确定动态薄液膜的厚度曲线。与通过手动颜色匹配过程重建的那些轮廓相比，提出的技术可将膜厚度曲线恢复到精度100 nm以内。随后，我们讨论了高光谱干涉仪的特征和优势，包括对想象噪声的鲁棒性增加以及执行厚度重建的能力，而无需考虑绝对的光强度信息。
Dynamic thin film interferometry is a technique used to non-invasively characterize the thickness of thin liquid films. Recovering the underlying thickness from the captured interferograms, unconditionally and automatically is still an open problem. Here we report a compact setup employing a snapshot hyperspectral camera and the related algorithms for the automated determination of thickness profiles of dynamic thin liquid films. The proposed technique is shown to recover film thickness profiles to within 100 nm of accuracy as compared to those profiles reconstructed through the manual color matching process. Subsequently, we discuss the characteristics and advantages of hyperspectral interferometry including the increased robustness against imagining noise as well as the ability to perform thickness reconstruction without considering the absolute light intensity information.
