论文标题

通过宽视野时空成像对光子电路的诊断和表征

Diagnostics and characterization of photonic circuits by wide-field spatio-temporal imaging

论文作者

Nuzhdin, Dmitry, Pattelli, Lorenzo, Nocentini, Sara, Wiersma, Diederik S.

论文摘要

综合光子技术的扩散越来越多,需要快速和非侵入性质量控制技术才能进行大规模生产。我们提出了一种一般的诊断技术,用于结合宽场光学显微镜和光学门控光子电路的子PS成像。同时访问光子结构的多个参数,可以对其功能设计进行前所未有的表征,而不是典型的单域技术,例如频率或时域反映速率和近场显微镜。该技术的非接触性和非扰动性使其与平面和三维电路以及硅,聚合物或混合平台相关。我们将技术应用于通过直接激光写作制造的不同光子芯片组件,揭示了制造缺陷的空间和时间标志,从而导致损失或偏离预期的设备行为。同时,该技术允许原位探测光子设备作为指导模式的局部传播常数或共振元素的质量因素。我们的方法与科学和工业社区有关,因为由于其非扫描性质,它可以使自己缩放到在线质量控制。

The growing diffusion of integrated photonic technologies requires fast and non-invasive quality control techniques for mass-production. We present a general diagnostic technique for sub-ps imaging of photonic circuits combining wide-field optical microscopy and optical gating. The simultaneous access to multiple parameters of a photonic structure enables an unprecedented characterization of its functional design as opposed to typical single-domain techniques such as frequency or time domain reflectometry and near-field microscopy. The non-contact and non-perturbative nature of the technique makes it relevant for both planar and three-dimensional circuits, as well as for silicon, polymeric or hybrid platforms. We apply our technique to different photonic chip components fabricated by Direct Laser Writing, revealing the spatial and temporal hallmarks of fabrication imperfections causing losses or deviations from the intended device behavior. At the same time, the technique allows in situ probing of key properties of photonic devices as the local propagation constants of guided modes or the quality factor of resonant elements. Our method is relevant for both the scientific and the industrial communities as it lends itself to be scaled up to in-line quality control thanks to its non-scanning nature.

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