论文标题
相位调节的腋窝作为超紧凑的光谱工具
Phase-modulated axilenses as ultra-compact spectroscopic tools
论文作者
论文摘要
我们设计并表征了相结合的，超紧凑的，基于硅的轴向设备，这些设备将有效的点焦点和光栅选择性结合在可扩展的4级相掩码配置中。所提出的设计是极敏感的，并且在宽光谱上保持了较大的聚焦效率。具体而言，我们选择并系统地表征为750nm-950nm $波长范围内的可见和近红外（NIR）操作设计的结构。这些设备非常适合在焦平面阵列（FPA）的基板层顶部的整体集成中，用于多波段照相检测和成像。我们展示了针对单个恰当平面上的多波长的线性控制，并提供了一个由备受证明的超紧凑型单镜光谱仪组成的应用程序，仅厚度为300 nm，直径为70 $ $ $ $ $ $ $ $ $ $ $ $δλ= 40nm = 40nm $ $ up $ up $ pa $ pable。提出的设备添加了基本光谱功能，以紧凑成像设备，以用于许多应用程序，从光谱分类到可见和NIR多光谱成像和检测。
We design and characterize phase-modulated, ultra-compact, silicon-based axilens devices that combine efficient point focusing and grating selectivity within scalable 4-level phase mask configurations. The proposed designs are polarization insensitive and maintain a large focusing efficiency over a broad spectral band. Specifically, we select and systematically characterize structures designed for visible and near-infrared (NIR) operation in the $750nm-950nm$ wavelength range. These devices are ideally suited for monolithic integration atop the substrate layers of focal plane arrays (FPAs) for use in multi-band photo-detection and imaging. We demonstrate linear control of multi-wavelength focusing on a single achromatic plane and provide an application consisting of a proof-of-concept ultra-compact single-lens spectrometer with only 300 nm thickness and 70$μm$ diameter, achieving a minimum distinguishable wavelength $Δλ=40nm$ at $λ_0=850nm$. The proposed devices add fundamental spectroscopic capabilities to compact imaging devices for a number of applications ranging from spectral sorting to visible and NIR multispectral imaging and detection.
