论文标题
石墨烯丝带具有悬浮质量作为超小纳米机电加速度计中的换能器
Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
论文作者
论文摘要
纳米电机机电系统（NEMS）传感器和执行器可以用于开发下一代移动，可穿戴设备和可植入设备。但是，这些NEM设备需要超小，敏感并且可以以低成本制造的换能器。在这里，我们表明，带有附着的硅质量的悬浮的双层石墨烯丝带可以用作弹簧质量和压电性传感器的组合。使用与大规模半导体制造技术兼容的过程实现的传感器可以产生与传统最先进的硅加速度计小至少两个数量级的死亡区域的NEM加速度计。
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring-mass and piezoresistive transducers. The transducers, which are realized using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers.
