论文标题
使用三维直接激光写作制造具有NM-至mm级关键特征的光学组件
Fabrication of optical components with nm- to mm-scale critical features using three-dimensional direct laser writing
论文作者
论文摘要
这里证明了一种强大的制造策略,该策略基于三维直接激光撰写,用于在这里展示具有关键特征的光学机械组件的快速原型制作,从几百nm到几mm。例如,设计和制造了带有光学和机械指南的简单光纤连接器以及具有纳米结构表面的集成微光学元件。与已建立的三维直接激光写入相反,在制造过程中将两种不同的聚合物组合在一起,以实现“光学工具路径”的大幅度减少制造时间的缩减。已经获得了实用的连接器和名义维度之间的良好一致性。开发的方法允许快速原型制作具有多尺度关键特征的光力组件。因此,可以通过将功能机械和光学元素整合到单个组件中,从而实质上加速了开发周期。
A powerful fabrication strategy based on three-dimensional direct laser writing for the rapid prototyping of opto-mechanical components with critical features ranging from several hundred nm to a few mm is demonstrated here. As an example, a simple optical fiber connector with optical and mechanical guides as well as integrated micro-optical elements with nano-structured surfaces is designed and fabricated. In contrast to established three-dimensional direct laser writing, two different polymers are combined in the fabrication process in order to achieve a drastic reduction in fabrication time by substantially reducing the "optical tool path". A good agreement between the as-fabricated connector and nominal dimensions has been obtained. The developed approach allows the rapid prototyping of optomechanical components with multi-scale critical features. It is, therefore, envisioned to substantially accelerate the development cycle by integrating functional mechanical and optical elements in a single component.