ISO INTERNATIONAL STANDARD 11952 Second edition 2019-05 Surface chemical analysis Scanning- probe microscopy Determination of geometric quantities using SPM: Calibration of measuring systems Analyse chimique des surfaces - Microscopie a sonde a balayage Détermination des quantités géométriques en utilisant des microscopes a sonde a balayage: Etalonnage des systemes de mesure Reference number IS0 11952:2019(E) @ IS0 2019 IS0 11952:2019(E) COPYRIGHTPROTECTEDDOCUMENT @ IS0 2019 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IsO at the address below or Iso's member body in the country of the requester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Fax: +4122 749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland i @ IS0 2019 - All rights reserved IS0 11952:2019(E) Contents Page Foreword V Introduction .ix 1 Scope. 1 2 Normative references .1 3 Terms and definitions 1 4 Symbols .2 5 Characteristics of SPMs. 4 5.1 Components of an SPM 4 5.2 Metrological categories of SPMs 6 5.3 Block diagram of an SPM. 6 5.3.1 For category C:. .6 5.3.2 Additionally, for category B: 6 5.3.3 Additionally, for category A:. 7 5.4 Calibrationinterval 7 6 Preliminary characterization of the measuring system .8 6.1 Overview of the instrument characteristics and influencing factors to be investigated ..8 6.2 Waiting times after interventions in the measuring system (e.g. instrument installation, intrinsic effects, carrying out operation, warm-up, tip/specimen change), 6.2.1 Adjustment of the instrument to ambient conditions. 10 6.2.2 Potential causes of drift 10 6.2.3 Procedure 10 6.3 External influences 11 6.3.1 Sourcesofexternalinfluences 11 6.3.2 Consequences of external influences and countermeasures. 11 6.4 Summary 11 Calibration of scan axes. .12 7.1 General 12 7.2 Measurement standards 12 7.2.1 Requirements for measurement standards. 12 7.2.2 Handling of measurement standards 13 7.3 Xy-scanner guidance deviations of the x- and y-axes (xtz, ytz) 13 7.3.1 Definition of xy-scanner guidance deviations in vertical direction (z-plane) 13 7.3.2 Measurement strategy 13 7.3.3 Flatness measurement standards 14 7.3.4 Measurements. 15 7.3.5 Evaluation of results 15 7.3.6 Summary 16 7.3.7 Extended calibration measurements 16 7.4 Calibration of x- and y-axis (Cx, Cy) and of rectangularity (Φxy) and determination of deviations (xtx, yty, ywx) .17 7.4.1 General 17 7.4.2 Definition of pitch px and py and rectangularity (@xy) in the x-y-plane .17 7.4.3 Measurement strategy. 17 7.4.4 Selection of lateral measurement standards 18 7.4.5 Basic calibration - Adjustments and measurements 19 7.4.6 Extended calibrations (scan speed, angle, and eccentric measurements) .20 7.4.7 Evaluation 21 7.4.8 Extended evaluations: nonlinearity of the x-y-axis 24 7.4.9 Summary 25 7.5 Calibration of the z-axis Cz, Φxz, and yz, and determination of the deviations ztz, zwx, and zwy. .26 7.5.1 General. .26 @ IS0 2019 - All rights reserved iii IS0 11952:2019(E) 7.5.2 Definitions of the step height 26 7.5.3 Measurement strategy 27 7.5.4 Selectionofstepheightmeasurementstandards 27 7.5.5 Basic calibration - Adjustments and measurements 28 7.5.6 Extended calibrations. 29 7.5.7 Evaluations. 30 7.5.8 Summary 34 7.6 3D measurement standards for alternative and extended calibration. 34 7.6.1 General. 34 7.6.2 Requirements for 3D measurement standards 34 7.6.3 Selectionofthe3Dmeasurementstandards. 35 7.6.4 Carrying-out of the basic calibration. 36 7.6.5 Evaluation of the measurements 36 7.6.6 Extended calibrations. 37 7.6.7 Advantages and disadvantages of the 3D measurement standard 37 8 Report of calibration re