TECHNICAL ISO/TR REPORT 18394 Secondedition 2016-05-01 Surface chemical analysis Auger electron spectroscopy - Derivation of chemical information Analyse chimique des surfaces - Spectroscopie des électrons Auger Déduction de I'information chimique Reference number AX IS0/TR 18394:2016(E) ISO International Organization for Standardization =ZHEJIANG INSTOF STANDARDIZATION C15956617 @IS02016 vided by IHS under lic itted without license from IHS IS0/TR18394:2016(E) COPYRIGHTPROTECTEDDOCUMENT IS0 2016, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Ch. de Blandonnet 8 . CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax +41227490947 [email protected] www.iso.org ensee-ZHEJIANG INST.OF STANDARDIzARoISQ16- All rights reserved Not for Resale, 2016/7/20 08:19:52 neiworking permited without license from IHS IS0/TR 18394:2016(E) Contents Page Foreword ..iv Introduction ..V 1 Scope. .1 2 Normative references ..1 3 Terms and definitions 4 Abbreviated terms .1 5 Types of chemical and solid-state effects in Auger-electron spectra. ..1 6 Chemical effects arising from core-level Auger-electron transitions .3 6.1 General .3 6.2 Chemical shifts of Auger-electron energies .3 6.3 Chemical shifts of Auger parameters. .4 6.4 Chemical-state plots. ..6 6.5 Databases of chemical shifts of Auger-electron energies and Auger parameters. .7 6.6 Chemical effects on Auger-electron satellite structures. 7 6.7 Chemical effects on the relative intensities and line shapes of CcC Auger-electron lines.... 8 6.8 Chemical effects on the inelastic region of CCC Auger-electron spectra .9 7 Chemical effects on Auger-electron transitions involving valence electrons ..10 7.1 General .10 7.2 Chemical-state-dependent line shapes of CCV and CvV Auger-electron spectra .10 7.3 Information on local electronic structure from analysis of CCV and CvV Auger- electronlineshapes .15 7.4 Novel techniques for obtaining information on chemical bonding from Auger processes 16 Bibliography 21 iii STANDARDIZATIONC15956617 rout license from IHS