ISO INTERNATIONAL STANDARD 13424 First edition 2013-10-01 Surface chemical analysis X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis Analyse chimique des surfaces - Spectroscopie de photoelectrons X Rapport des résultats de I'analyse de films minces Reference number ISO 13424:2013(E) LSO IS02013 ed without license from IHS Not for Resale IS0 13424:2013(E) COPYRIGHTPROTECTEDDOCUMENT @ IS0 2013 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56:CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2013 - All rights reserved No reproductic networking permited without license from IHS Not for Resale IS0 13424:2013(E) Contents Page Foreword ..iv Introduction. ..V 1 Scope. ..1 2 Normative references ..1 3 Terms and definitions 4 Abbreviated terms .1 5 Overview of thin-film analysis by XPS .1 5.1 Introduction .1 5.2 General XPS .3 5.3 Angle-resolved XPS. .3 5.4 Peak-shape analysis. .3 5.5 Variable photon energy XPS .3 5.6 XPS with sputter-depth profiling .3 6 Specimen handling .4 7 Instrument and operating conditions 7.1 Instrument calibration 4 7.2 Operating conditions 4 8 Reporting XpS method, experimental conditions, analysis parameters, and analytical results .5 8.1 XPS method for thin-film analysis .5 8.2 Experimental conditions .5 8.3 Analysisparameters. .6 8.4 Examples of summary tables. .7 8.5 Analytical Results. .9 Annex A (informative) General XPs ..10 Annex B (informative) Angle-resolved XPs ..18 Annex C (informative) Peak-shape analysis .24 Annex D (informative) XPS with sputter-depth profiling ..37 Bibliography ..40 iii se with ISt thout license from IHS Not for Resale