ISO INTERNATIONAL STANDARD 23830 First edition 2008-11-15 Surface chemical analysis Secondary-ion mass spectrometry Repeatability and constancy of the relative-intensity scale in static secondary-ion mass spectrometry Analyse chimique des surfaces-Spectrométrie de masse des ions secondaires - Répétabilité et constance de I'échelle des intensités relativesenspectrometriestatiquedemassedesionssecondaires Reference number ISO 23830:2008(E) @ ISO 2008 by IHS under ted without license from IHS Not for Resale ISO 23830:2008(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In downloading this file, parties accept therein the responsibility of not infringing Adobe's licensing policy. The IsO Central Secretariat accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated. Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by IsO member bodies. In the unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below. COPYRIGHT PROTECTED DOCUMENT @ ISO2008 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, IsO's member body in the country of the requester. ISO copyright office Case postale 56 . CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyright@iso.org Web www.iso.org Published in Switzerland @ IS0 2008 - All rights reserved py IHS unde I without license from IHS Not for Resale ISO 23830:2008(E) Contents Page Foreword. Introductior 1 Scope 2 Symbols and abbreviations 3 Outline of method 4 Method for confirming the repeatability and constancy of the intensity scale.. 4.1 Obtaining the reference sample.. 4.2 Preparationformountingthesample. 4.3 Mounting the sample..... 4.4 Choosing the spectrometer settings for which intensity stability is to be determined.. 4.5 Operating the instrument.... 4.6 Measurements of the intensity and its repeatability .... 4.7 Calculating the intensity repeatability.... 4.8 Procedure for the regular determination of the constancy of the relative-intensity scale 4.9 Next calibration.. Annex A (informative) Example of suitable operating conditions for static SiMS . Bibliography 2 Copyright International Organizaion for Standardizalon'ghts reserved ii se from IHS Not for Resale
ISO 23830 2008 Surface chemical analysis — Secondary-ion mass spectrometry — Repeatability and constancy of the relative-intensity scale in static secondary-ion mass spectrometry
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