ISO/TR TECHNICAL REPORT 19319 Second edition 2013-03-15 Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods Analyse chimique des surfaces -Approche fondamentale pour la détermination de la résolution latérale et de la netteté par des méthodes a base de faisceau Reference number IS0/TR 19319:2013(E) LSO IS02013 ed without license from IHS Not for Resale IS0/TR 19319:2013(E) COPYRIGHTPROTECTEDDOCUMENT ISO2013 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISOcopyrightoffice Case postale 56:CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax +4122 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2013 - All rights reserved No reproductic networking permited without license from IHS Not for Resale IS0/TR 19319:2013(E) Contents Page Foreword ..iv Introduction. ..V 1 Scope. .1 2 Terms and definitions ..1 3 Symbols and abbreviated terms ..4 4 Determination of lateral resolution and sharpness by imaging of stripe patterns 4.1 Theoretical background 7 4.2 Determination of the line spread function and the modulation transfer function by imaging of a narrow stripe .21 4.3 Determination of the edge spread function (ESF) by imaging a straight edge. 41 4.4 Determination of lateral resolution by imaging of square-wave gratings 56 5 Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in AES and XPS .96 5.1 General information 96 5.2 Lateral resolution of AES and XPS 97 5.3 Analysisarea 104 5.4 Sample area viewed by the analyser .106 6 Measurements of analysis area and sample area viewed by the analyser in AEs and XPS 107 6.1 General information .107 6.2 Analysisarea 108 6.3 Sample area viewed by the analyser .109 Annex A (informative) Reduction of image period for 3-stripe gratings .110 Bibliography .113 iii e with I ut license from IHS Not for Resale