ISO INTERNATIONAL STANDARD 27911 First edition 2011-08-01 Surface chemical analysis Scanning probe microscopy Definition and calibration of the lateral resolution of a near-field optical microscope Definition et étalonnage de la resolution laterale d'un microscope optique en champ proche Reference number ISO 27911:2011(E) @ ISO 2011 y IHS unde nse from IHS Not for Resale ISO 27911:2011(E) COPYRIGHTPROTECTEDDOCUMENT @ ISO2011 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means Iso's member body in the country of the requester. ISO copyright office Case postale 56 : CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ ISO 2011 - All rights reserved itted without license from IHS Not for Resale ISO 27911:2011(E) Contents Page Foreword Introduction 1 Scope 2 Normative references. 3 Terms and definitions 4 Symbolsandabbreviatedterms, 5 General information ... 5.1 Background information. 5.2 Types of NsoM operation.. 5.3 Methods of measuring the lateral resolution of an NsoM. 5.4 Parametersthataffectthelateralresolution.. 6 Measurement of lateral resolution by imaging a very small object. 6.1 Backgroundinformation... 6.2 Selection of the specimen and specimen requirements. 6.3 Setting the parameters before the operation of the instrument... 6.4 Data collection and analysis ... 6.5 Recording of data ... Annex A (informative) Examples using a line-profile and a CdSe/ZnS quantum dot as specimen... Annex B (informative) Example of a procedure for preparing standard NsoM specimens ... 15 Bibliography... ii from IHS Not for Resi