ISO INTERNATIONAL STANDARD 23833 Second edition 2013-04-15 Microbeam analysis Electron probe microanalysis (EPMA) Vocabulary Analyse par microfaisceaux - Analyse par microsonde électronique (microsonde de Castaing) Vocabulaire Reference number ISO 23833:2013(E) ISO @IS02013 No reproduction or networking permitted without license from IHS Not for Resale IS0 23833:2013(E) COPYRIGHTPROTECTEDDOCUMENT @IS02013 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 : CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2013 - All rights reserved Not for Resale IS0 23833:2013(E) Contents Page Foreword ..iv Introduction. 1 Scope.. 2 Abbreviated terms 3 Definitions of general terms used in electron probe microanalysis 4 Definition of terms used to describe EPMA instrumentation ..7 5 Definitions of terms used in EPMA methodology ..17 Bibliography .27 Copyritnteatinal rganiason t? Sanarizal rights reserved ii se with IS ted without license from IHS Not for Resale