ISO INTERNATIONAL STANDARD 14644-17 First edition 2021-02 Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications Salles propres et environnements maitrisés apparentés - Partie 17: Applications de taux de dépot de particules Reference number ISO 14644-17:2021(E) OS1 @ ISO 2021 IS0 14644-17:2021(E) COPYRIGHTPROTECTEDDOCUMENT IS02021 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting below or ISo's member body in the country of the requester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2021 - All rights reserved